Surface roughness modeling
Publication Type
Conference Proceeding Article
Publication Date
12-2002
Abstract
Microelectronic and molecular devices are formed on the surfaces, which are microscopically rough. To understand how the devices are formed on the rough surfaces and to model their electrical behavior surface modeling has become essential. In this work CAD tool to generate surfaces with roughness has been developed. To represent the surface we have implemented Fast Fourier Transform (FFT), Mandelbrot Weierstrass function, and backpropagation neural networks. FFT method was used because it has been used traditionally for surface modeling. We used the concept of self-similar fractals to model the rough surface (M-W function) because it has been shown that the fractal dimension (D) can quantitatively describe surface microscopic roughness and it is scale independent. We are using Neural Networks to model these surfaces to map the process parameters to roughness parameters.
Discipline
Databases and Information Systems
Research Areas
Data Science and Engineering
Publication
Proceedings of the International Conference on Scientific and Engineering Computation, Singapore, 2002 December 3-5
First Page
239
Last Page
242
ISBN
1860943454
Identifier
10.1142/9781860949524_0055
Publisher
World Scientific
City or Country
Singapore
Citation
PATRIKAR, Rajendra M. and RAMANATHAN, Kiruthika.
Surface roughness modeling. (2002). Proceedings of the International Conference on Scientific and Engineering Computation, Singapore, 2002 December 3-5. 239-242.
Available at: https://ink.library.smu.edu.sg/sis_research/7433
Additional URL
https://doi.org/10.1142/9781860949524_0055