Mathematical models in integrated-circuit manufacturing: A review

Publication Type

Book Chapter

Publication Date

1993

Abstract

In this paper, we review mathematical models that have been developed for improving the performance of a wafer fab that faces yield uncertainty and system uncertainty such as machine failures. Specifically, we focus on models that deal with the design and operational issues arising from a wafer fab. We classify these models into two main categories: yield models and wafer-design models. These models address different strategic and planning issues that related to yield uncertainty and system uncertainty in IC manufacturing, and can be used to predict system performance of a specific production plan or system design. Besides the predictive power, these models can be used for optimization.

Keywords

Wafer fabrication, machine failures, integrated circuits

Discipline

Operations and Supply Chain Management | Operations Research, Systems Engineering and Industrial Engineering

Research Areas

Operations Management

Publication

Perspectives in Operations Management

Editor

S. K. Sarin

First Page

389

Last Page

408

ISBN

9780792392637

Identifier

10.1007/978-1-4615-3166-1_20

Publisher

Springer

City or Country

Boston

Additional URL

https://doi.org/10.1007/978-1-4615-3166-1_20

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