Title

Non-Critical Waveguide Alignment for Vertically-Coupled Microring using a Mode-Expanded Bus Architecture

Publication Type

Journal Article

Publication Date

2006

Abstract

Vertically coupled microrings in an all-pass filter configuration are fabricated with a range of waveguide misalignments deliberately introduced into the lithography masks to demonstrate noncritical fabrication requirements. The microrings have a mode-expanded bus design which allows a greatly reduced variation in power coupling coefficient-only 6% for fabrication misalignments as high as 1 mum. This represents a five-fold improvement in fabrication tolerance when compared with conventional designs.

Keywords

passive integration, coupling coefficient, microring resonator, mode-expanded bus waveguide, vertical coupling, wafer bonding, waveguide coupling, waveguide misalignment

Discipline

Physical Sciences and Mathematics

Research Areas

Quantitative Finance

Publication

IEEE Photonic Technology Letters

Volume

18

Issue

20

First Page

2129

Last Page

2131

ISSN

1041-1135

Identifier

10.1109/LPT.2006.883199

Publisher

IEEE